Ultra-high sensitivity mass spectrometry device WATMASS-MPH DA system
[New Concept Mass Spectrometry] For ultra-trace leak detection in encapsulated devices such as MEMS, life science devices, and semiconductors!
The "WATMASS-MPH DA System" is a new concept mass spectrometer that combines the technology of our ultra-low gas emission residual gas analyzer "WATMASS" with the technology of ultra-low gas emission vacuum structural materials (0.2% BeCu alloy). Our ultra-trace gas analysis device "WATMASS-MPH System" is capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s). It is suitable for MEMS, life science devices, and sealing devices such as semiconductors! ★ We also accept various commissioned mass analyses (gas analyses) for device evaluation and material evaluation! ★ 【Features】 ■ Ultra-high sensitivity gas analysis device made of 0.2% BeCu alloy ■ Measurement accuracy evaluation obtained from AIST ■ Capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s) ■ Commissioned mass analyses are also available * For more details, please refer to the PDF document or feel free to contact us.
- Company：東京電子
- Price：Other
